儀器簡(jiǎn)介：
用途:
質(zhì)量流量控制器（MFC）用于對(duì)氣體的質(zhì)量流量進(jìn)行精密地測(cè)量和控制。廣泛用于電子工藝設(shè)備、真空鍍膜、石油化工、冶金、制藥、光纖熔煉、分析測(cè)量?jī)x器、制氣配氣等行業(yè)。
標(biāo)準(zhǔn):
氣體質(zhì)量流量用氮?dú)?N2)標(biāo)定。標(biāo)準(zhǔn)狀態(tài)規(guī)定為：
標(biāo)準(zhǔn)溫度………………0℃（273.15K）
標(biāo)準(zhǔn)壓強(qiáng)………………101325Pa
輸入和輸出:
輸入電源………………+15V,50mA;-15V,200mA
輸入設(shè)定電壓…………0～+5.00V
輸出電壓檢測(cè)…………0～+5.00V
技術(shù)參數(shù)：
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